| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid for trench filling which offers satisfactory levels of easiness of film formation and fillability into a trench while imparting good resistance to crack.SOLUTION: A coating liquid for trench filling comprises: (i) a polysiloxane compound having a unit structure expressed by the general formula (1): [HSiO][SiO][OX][OH](1), where each Xis a carbon hydride group or acetyl group which has 1-6 carbon atoms, provided that X's may be identical to or different from each other, and a, b, c and d each represent a real number, and satisfy the following conditions: 0≤a≤1, and 0≤b≤1 provided that a+b=1, and 0<c<3a+4b, and 0<d<3a+4b provided that 0<c+d≤3a+4b and 0.02≤c/(3a+4b)≤0.35; and (ii) silica particles. To the total mass of the mass of the polysiloxane compound in terms of condensation weight and that of the silica particles, the silica particles account for 1-60 mass%. |
