| 摘要 |
PROBLEM TO BE SOLVED: To simply and highly accurately change a polarization axis direction.SOLUTION: A polarization exposure device 1 includes a polarization irradiation part 2 including a light source 20 and a polarizer 21 provided to extend along the light source 20 and irradiating a surface W1 to be exposed with light emitted from the light source 20 through the polarizer 21, a rotary drive part 3 rotationally driving the polarization irradiation part 2 around a rotation axis R, a polarization axis setting part 4 provided on the rotation axis R on the rear side of the surface W1 to be exposed and setting the direction of a polarization axis 21a of the polarizer 21, and a control part 5 controlling the rotary drive part 3, according to the setting of the polarization axis setting part 4. The polarization axis setting part 4 includes a rotatable and adjustable analyzer 40 and a received light quantity detector 41 receiving the light after passing through the analyzer 40, to set the direction of the polarization axis by the rotational direction of the analyzer 40 and the control part 5 controls the rotary drive part 3 so as to make the output of the received light quantity detector 41 maximum. |
