| 摘要 |
Within an area (A 0 ) where of four heads (60 1 to 60 4 ) installed on a stage (WST1), heads included in the first head group and the second head group to which three heads each belong that include one head different from each other face the corresponding areas on a scale plate, the stage (WST1) is driven based on positional information which is obtained using the first head group, as well as obtaining the displacement (displacement of position, rotation, and scaling) between the first and second reference coordinate systems (C 1 , C 2 ) corresponding to the first and second head groups using the positional information obtained using the first and second head groups. By using the results and correcting measurement results obtained using the second head group, the displacement between the first and second reference coordinate systems (C 1 , C 2 ) is calibrated, which allows the measurement errors that come with the displacement between the areas on the scale plates where each of the four heads (60 1 to 60 4 ) face to be corrected. |
