| 摘要 |
Two-dimensional measurement is allowed with a small error even in the case where a difference occurs between a measurement plane for a workpiece and a plane with calibrated external parameters. When the workpiece 2 is gripped by a holding device 3, an image measurement apparatus 1 calculates the difference between the calibration plane 17 where the external parameters are calibrated and the measurement plane 20 for the workpiece 2. The image measurement apparatus 1 corrects the external parameters such that the calibration plane 17 coincides with the measurement plane 20, and two-dimensionally measures the workpiece 2 using the corrected external parameters. |
