发明名称 半導体装置
摘要 According to one embodiment, a semiconductor device includes a semiconductor substrate in which a recess is provided on a back surface thereof, and a shape of the recess is reflected on a surface of a metal film which is also provided on the back surface of the semiconductor substrate.
申请公布号 JP6027511(B2) 申请公布日期 2016.11.16
申请号 JP20130189428 申请日期 2013.09.12
申请人 株式会社東芝 发明人 鷹野 正宗
分类号 H01L21/28;H01L21/336;H01L29/417;H01L29/739;H01L29/78 主分类号 H01L21/28
代理机构 代理人
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