| 摘要 |
A return jig comprises: a substrate support surface where multiple individual substrates are arranged on top of each other in a predetermined arrangement; multiple adsorption holes for respectively adsorbing the multiple individual substrates which are arranged on top of each other in the substrate support surface; a zig main body part including one vacuum chamber connected to the adsorption holes; and a reduced pressure maintenance part including a supply hole for supplying negative pressure to the vacuum chamber, and a vacuum valve arranged between the supply hole and the vacuum chamber. The vacuum valve maintains the vacuum chamber in a reduced pressure state since the vacuum chamber is closed after the negative pressure is supplied. |
