发明名称 |
COATING PROCESS USING GAS SCREEN |
摘要 |
A method for use in a coating process includes pre-heating a substrate in the presence of a coating material and shielding the substrate during the pre-heating from premature deposition of the coating material by establishing a gas screen between the substrate and the coating material. An apparatus for use in a coating process includes a chamber, a crucible that is configured to hold a coating material in the chamber, an energy source operable to heat the interior of the chamber, a coating envelope situated with respect to the crucible, and at least one gas manifold located near the coating envelope. The at least one gas manifold is configured to provide a gas screen between the coating envelope and the crucible. A second manifold provides gas during a later coating deposition to compress a vapor plume of the coating material and focus the plume on the substrate to increase deposition rate. |
申请公布号 |
EP3092324(A1) |
申请公布日期 |
2016.11.16 |
申请号 |
EP20150735044 |
申请日期 |
2015.01.07 |
申请人 |
UNITED TECHNOLOGIES CORPORATION |
发明人 |
DEPALMA, JOSEPH A.;TRUBELJA, MLADEN F.;LITTON, DAVID A.;NOVIKOV, DMITRI L.;BURLATSKY, SERGEI F. |
分类号 |
C23C14/06;C23C14/28 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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