| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity measurement device by which a satisfactory measurement signal is easily obtained without adjusting a mounting position of a sensor, a magnetic floating device with the physical quantity measurement device, a vacuum pump.SOLUTION: In a sensor which measures a physical quantity based on high frequency voltage to which amplitude modulation is performed by inductance variation of a coil, adjustment of sensor sensitivity is allowed without requiring mounting position adjustment of the coil or its core by providing the coil with variable means of frequency characteristics of modulated high frequency voltage or frequencies of the high frequency voltage. In addition, power consumption is reduced to adopt a lower saturation amplifier by providing differential means, and outputting a difference between a measurement signal and an adjustable reference value signal. Furthermore, compatibility between a mechanism part and a controller is improved by arranging adjustment means to a magnetic bearing or the mechanism part of a vacuum pump. |
