| 摘要 |
First, an electron beam (1) is focused in vacuum environment by a first magnetic field (2), the magnitude of the electron beam aperture angle is defined (1), and the defined aperture angle is then deflected by second magnetic field (5) aside. Subsequently, the so deflected electron beam (1) is expanded by a third magnetic field (6). Whereupon there is read and evaluated a line spectrum created by the expanded electron beam (1) on e scintillation ghost screen (7). The energy spectrometer comprises an electron gun (8) with a cathode and a small virtual source, and a condenser lens (9) assigned thereto for focusing the electron beam (1) emitted from the electron gun (8). After the condenser lens (9), there is arranged in the direction of the energy spectrometer optical axis (10) a screen (3) for optimization of the electron beam (1) diameter (1) prior its entry into a magnetic prism (11) for the deflection of the electron beam (1), arranged after the screen (3) in the direction of the energy spectrometer optical axis (10). After that, in the direction of the energy spectrometer optical axis (10), there is arranged a first scintillation ghost screen (4) to enable the check of the electron bean (1) focusing. After the magnetic prism, in the direction of the optical axis (10) of the electron beam (1) deflected by the magnetic prism (11), there is arranged a projection lens (12) for increasing the dimension of the spectrum. A second scintillation ghost screen (7) for displaying the line spectrum of the electron emission energy distribution is arranged after the projection lens (12). |
