| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder which can be used in an expanded temperature zone.SOLUTION: A substrate holder 13 comprises: a relay circuit 61 which is connected to a second end of a ground shaft 53 having a first end in conduction with a substrate support surface 45 so as to switch the ground shaft 53 to ground potential; a compression coil spring 59 which urges a cap of the first end of the ground shaft 53 so as to push the cap against the substrate support surface 45; a bellows 57 which includes the second end of the ground shaft 53 arranged at a vacuum side, and expands and contracts in the urging direction of the compression coil spring 59; and an O ring 63 which is held in the urging direction of the compression coil spring 59. In this structure, conduction with the substrate support surface 45 can be ensured even when the ground shaft 53 is thermally expanded. |
