| 摘要 |
PROBLEM TO BE SOLVED: To suppress generation of dicing debris occurring at the time of dicing a workpiece without applying physical energy such as electron beams and γ rays.SOLUTION: A substrate includes a block copolymer shown by the following formula: (high Tg block)-{(low Tg block)-(high Tg block)}n, wherein: n is an integer of 1 to 3; the high Tg block is a polymer block comprising a monomer unit whose homopolymer has 0°C or higher glass transition temperature; the low Tg block is a polymer block comprising a monomer unit whose homopolymer has lower than 0°C glass transition temperature; the difference between the glass transition temperature of the high Tg block and the glass transition temperature of the low Tg block is 30°C or more; and 25 mass% or more of the high Tg monomer is contained in 100 mass% of whole monomers used for polymerization of the block copolymer. |
