| 发明名称 |
基板支持用ボートおよびこれを用いた支持ユニット |
| 摘要 |
Disclosed are a boat for supporting a substrate and a support unit using same. The boat for supporting a substrate and a support unit using same according to the present invention enable the entire surface of the substrate to be supported uniformly using a plurality of first support pins and second support pins, thereby preventing the sagging of the substrate due to tare thereof when treating the substrate. Therefore, the reliability of the treatment process for the substrate is enhanced because the substrate does not experience change in characteristics even when treated. |
| 申请公布号 |
JP6006734(B2) |
申请公布日期 |
2016.10.12 |
| 申请号 |
JP20130551915 |
申请日期 |
2012.01.31 |
| 申请人 |
株式会社テラセミコンＴＥＲＡＳＥＭＩＣＯＮ ＣＯＲＰＯＲＡＴＩＯＮ |
发明人 |
カン、ホヨン;パク、キョンワン;チョ、ビュンホ;パク、ジュヨン |
| 分类号 |
H01L21/683;C23C14/50;C23C16/458;H01L21/205;H01L21/31 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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