| 发明名称 |
CATALYST DEHYDROGENATIVE COUPLING OF CARBOSILANES WITH AMMONIA, AMNINES AND AMIDINES |
| 摘要 |
Si-containing film forming compositions are disclosed comprising Si-N containing precursors. Also disclosed are methods of synthesizing the same and methods of using the same for vapor deposition. In particular, a catalytic dehydrogenative coupling of carbosilanes with ammonia, amines and amidines produces the Si-N containing precursors. |
| 申请公布号 |
WO2016160991(A1) |
申请公布日期 |
2016.10.06 |
| 申请号 |
WO2016US25011 |
申请日期 |
2016.03.30 |
| 申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;AIR LIQUIDE ADVANCED MATERIALS, LLC;KERRIGAN, Sean;SANCHEZ, Antonio |
发明人 |
KERRIGAN, Sean;SANCHEZ, Antonio |
| 分类号 |
C07F7/10;C07F7/20;C23C16/30;C23C16/44;H01L21/205 |
主分类号 |
C07F7/10 |
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