发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a transistor with stable electric characteristics.SOLUTION: A semiconductor device comprises an oxide semiconductor, a first conductor, a first insulator, a second insulator, a third insulator, and a fourth insulator. The oxide semiconductor is arranged on the first insulator. The second insulator is arranged on the oxide semiconductor. The third insulator is arranged on the second insulator. The first conductor is arranged on the third insulator. The fourth insulator is arranged on the first conductor. The fourth insulator has a region in contact with an upper surface of the second insulator. The oxide semiconductor has a region overlapped with the first conductor via the second and third insulators. When seen from an upper surface, an outer periphery of the first insulator and an outer periphery of the second insulator are located outside an outer periphery of the oxide semiconductor.SELECTED DRAWING: Figure 1
申请公布号 JP2016178297(A) 申请公布日期 2016.10.06
申请号 JP20160052697 申请日期 2016.03.16
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H01L29/786;H01L21/336;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/8247;H01L27/088;H01L27/092;H01L27/108;H01L27/115;H01L27/146;H01L29/788;H01L29/792 主分类号 H01L29/786
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