| 摘要 |
A composition for forming a silicon-containing film of one embodiment of the present invention contains (A) a siloxane polymer that has a ring structure in a side chain, (B) a polar low-molecular-weight compound and (C) a solvent. The siloxane polymer (A) has a constituent unit represented by formula (a-2). Examples of the polar low-molecular-weight compound (B) may include basic amines such as a secondary or tertiary alcohol amine and an alkyl amine. With respect to the solvent (C), any solvent is applicable as long as the solvent dissolves the siloxane polymer (A). |
