| 摘要 |
The invention provides a support pin, a substrate support device, and a substrate processing device. The support pin can be shared regardless of whether there is a positioning plate or not. The support pin (50) is configured on a pedestal (31) of the substrate support device and used for supporting a print substrate (P). The support pin comprises a support pin main body (51) and a posture stabilization part (60). The support pin main body (51) has a small-diameter part (53) formed at a lower end side and a support part (55) formed at a front end side. The small-diameter part (53) is embedded in a positioning hole (43) formed in a positioning plate (40), wherein the positioning plate (40) can be detachably mounted on the pedestal. The support part supports the print substrate (P). The posture stabilization part (60) can be detachably mounted on the small-diameter part (53) of the support pin main body. In a condition that the support pin main body (51) is arranged on the pedestal (31) without using the positioning plate (40), the support pin main body is enabled to be stably in an erection posture relative to the pedestal. |
