发明名称 周期的分極反転構造の形成方法及び周期的分極反転用電極
摘要 PROBLEM TO BE SOLVED: To provide a formation method of a periodic polarization inversion structure where a polarization inversion structure with a uniform shape is formed, and an electrode for periodic polarization inversion.SOLUTION: An electrode for polarization inversion includes a potential equalization electrode part extending in a column direction, and a plurality of periodic electrode parts arraying a plurality of stripe-shaped electrode pieces extending in a row direction perpendicular to the column direction from the potential equalization electrode part, in the column direction in a periodic manner respectively. A formation method of a periodic polarization inversion structure includes the steps of: forming the electrode for polarization inversion on a periodic electrode surface that is one of a +C face and a -C face perpendicular to a polarization direction of a ferroelectric crystal substrate; forming a plane electrode on a solid electrode surface that is the other of the +C face and the -C face of the ferroelectric crystal substrate so as to cover the whole area of the solid electrode surface facing at least an area where the periodic electrode parts are arranged; and generating a polarization inversion structure on the ferroelectric crystal substrate below the periodic electrode parts by applying voltage between the electrode for polarization inversion and the plane electrode.
申请公布号 JP6002390(B2) 申请公布日期 2016.10.05
申请号 JP20120006788 申请日期 2012.01.17
申请人 株式会社島津製作所 发明人 門倉 一智;徳田 勝彦;久光 守;井上 和哉
分类号 G02F1/37 主分类号 G02F1/37
代理机构 代理人
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