发明名称 |
SYSTEM AND METHOD OF SEMICONDUCTOR MANUFACTURING WITH ENERGY RECOVERY |
摘要 |
The invention can provide or facilitate energy recovery operations during semiconductor processing operations by utilizing a bell jar having a radiation shield thereon that is comprised of a mediating layer comprising nickel disposed on an interior surface of the bell jar, and a reflective layer which can comprise a gold layer that is disposed on the mediating layer. The reflective layer has an emissivity of less than 5% and, more preferably, the reflective layer has an emissivity of less than about 1%. Heat from the reaction chamber can be used to reduce the heating load of one or more other unit operations. |
申请公布号 |
EP2589068(B1) |
申请公布日期 |
2016.09.28 |
申请号 |
EP20110804092 |
申请日期 |
2011.06.27 |
申请人 |
GTAT CORPORATION |
发明人 |
GUM, JEFFREY, C.;FERO, CHAD |
分类号 |
C01B33/035;C23C16/24;C23C16/44;C23C16/46;H01L21/205 |
主分类号 |
C01B33/035 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|