| 摘要 |
The present invention relates to an inspecting method and an apparatus for treating a substrate. According to an embodiment of the present invention, the apparatus comprises: a process chamber; a container disposed within the process chamber and having a processing space; a supporting unit disposed within the processing space and supporting a substrate; a liquid supplying unit including a nozzle for supplying liquid to the substrate in a spray type; and an inspecting unit for inspecting the liquid supplied to the substrate. The inspecting unit includes a photographing member, and a determining member which determines a spray state of the liquid by obtaining an image of a region spaced a predetermined distance apart from the end of the nozzle. The determining member extracts a liquid pixel, which is a pixel corresponding to the liquid, from the image and determines the spray state of the liquid by using the extracted liquid pixel. |
