发明名称 複合砥粒とその製造方法と研磨方法と研磨装置
摘要 PROBLEM TO BE SOLVED: To provide: a method for polishing the surface of a sapphire in high quality at a high polishing speed; composite abrasive grains used for polishing; and a polishing device.SOLUTION: Abrasive grains for wet-polishing a sapphire are composite abrasive grains obtained by directly bonding a mixture of a first particulate abrasive 12 having a Mohs hardness of 7 or more and 9 or less, a second particulate abrasive 13 having mechanochemical action to the sapphire and a particulate frictional heat reactive agent 14 insoluble to pure water used for slurry and consisting of alkaline metal salt or alkaline earth metal salt by a mechanical alloy method and integrating the resultant mixture in a particulate shape.
申请公布号 JP5997235(B2) 申请公布日期 2016.09.28
申请号 JP20140238783 申请日期 2014.11.26
申请人 アサヒ化成工業株式会社 发明人 藤本 俊一;山下 哲二
分类号 C09K3/14;B24B37/00;C09G1/02;H01L21/304 主分类号 C09K3/14
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