| 摘要 |
PURPOSE:To provide a multilayered glass ceramic base plate having an excellent mechanical strength and prospective high-density fine wirings having high speeds and a method for producing the same. CONSTITUTION:The glass ceramic layer of a multilayered glass ceramic substrate containing a conductor as an inner layer is composed of 12-59.6wt.% of alumina, 10-30wt.% of quartz glass, 18-69.6wt.% of borosilicate glass and 1-50wt.% of anorthite crystals, making a total of 100wt.%. The powder of a mixture comprising 10-50wt.% of the alumina, 10-50wt.% of the quartz glass and 40-70wt.% of the calcium borosilicate glass in the total amount of 100wt.% is employed as the production raw materials, or the alumina, quartz glass, borosilicate glass and anorthite having average particle sizes of 0.5-3mum, 1-10mum, 1-5mum and 1-10mum, respectively, are employed. |
