| 摘要 |
The present invention relates to a clamp apparatus, a substrate carry-in/out apparatus using the same, and a substrate processing apparatus, to reduce scattering of particles in a clamp mechanical device to fix a substrate accommodating container when ejecting a substrate from the substrate accommodating container such as Front Opening Unified Pod (FOUP) and sending to a substrate carrying region. The clamp apparatus (100) of the present invention comprises: a clamp member (81) configured to contact a substrate accommodating container (C) from an upper side and fix the substrate accommodating container (C) to a predetermined position when a cover (68) provided on a front surface of the substrate accommodating container (C) is opened/closed; a driving mechanism (86, 87) configured to drive the clamp member; a casing (85) configured to cover the driving mechanism; an exhaust chamber (90) provided near the casing and including a suction port (91) configured to communicate with the casing; and a fan (94) provided inside the exhaust chamber. |
