发明名称 LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
摘要 The invention relates to light sources with laser pumping and to methods for generating radiation with a high luminance in the ultraviolet (UV) and visible spectral ranges. The technical result of the invention consists in extending the functional possibilities of a light source with laser pumping by virtue of increasing the luminance, increasing the coefficient of absorption of the laser radiation by a plasma, and significantly reducing the numerical aperture of a divergent laser beam which is to be occluded and which is passing through the plasma. The device comprises a chamber containing a gas, a laser producing a laser beam, an optical element which focuses the laser beam on a first side of the chamber, a region of radiating plasma produced in the chamber by the focussed laser beam, an occluder, which is mounted on the axis of the divergent laser beam on the second side of the chamber, which is opposite the first side, and an optical system for collecting plasma radiation.
申请公布号 EP2933823(B1) 申请公布日期 2016.09.21
申请号 EP20130864433 申请日期 2013.08.23
申请人 RND-ISAN, LTD. 发明人 ANTSIFEROV, PAVEL STANISLAVOVICH;KOSHELEV, KONSTANTIN NIKOLAEVICH;KRIVTSUN, VLADIMIR MIKHAILOVICH;LASH, ALEKSANDR ANDREEVICH
分类号 H01J61/76;H01J61/02;H01J65/04 主分类号 H01J61/76
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