发明名称 半導体装置およびその製造方法
摘要 The present invention is directed to a semiconductor device including a semiconductor chip formed with an SiC-IGBT including an SiC semiconductor layer, a first conductive-type collector region formed such that the collector region is exposed on a second surface of the SiC semiconductor layer, a second conductive-type base region formed such that the base region is in contact with the collector region, a first conductive-type channel region formed such that the channel region is in contact with the base region, a second conductive-type emitter region formed such that the emitter region is in contact with the channel region to define a portion of a first surface of the SiC semiconductor layer, a collector electrode connected to the collector region, and an emitter electrode connected to the emitter region, and a MOSFET including a second conductive-type source region electrically connected to the emitter electrode and a second conductive-type drain region electrically connected to the collector electrode, the MOSFET connected in parallel to the SiC-IGBT.
申请公布号 JP5995435(B2) 申请公布日期 2016.09.21
申请号 JP20110273401 申请日期 2011.12.14
申请人 ローム株式会社 发明人 明田 正俊;中野 佑紀
分类号 H01L29/739;H01L21/336;H01L21/8234;H01L27/04;H01L27/06;H01L27/088;H01L29/06;H01L29/12;H01L29/47;H01L29/78;H01L29/872 主分类号 H01L29/739
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