发明名称 半導体装置の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which can inhibit process abnormality and variation which are caused by a level difference of a substrate by absorbing the level difference with respect to the substrate having the level difference on a principal surface.SOLUTION: A semiconductor device manufacturing method comprises: a process (S101) of preparing a semiconductor substrate having irregularity on one principal surface; and a process (S102) of filling the irregularity with a protective paste by screen printing the protective paste on the principal surface. The filling process (S102) includes a process of supplying the protective paste to the principal surface via a printing mask having an opening. The printing mask is formed such that a height of a side wall of the opening becomes larger than a thickness of a region other than the opening.
申请公布号 JP5995640(B2) 申请公布日期 2016.09.21
申请号 JP20120224942 申请日期 2012.10.10
申请人 三菱電機株式会社 发明人 中田 和成
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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