| 摘要 |
A roll apparatus 300 includes a suction roll 25, a suction mechanism 65, and a gas-permeable member 81. The suction roll 25 is rotatable and has an outer circumferential surface 25a and an inside defined by the outer circumferential surface 25a. The suction mechanism 65 generates a suction force toward the inside from an outside of the suction roll 25. The gas-permeable member 81 covers the outer circumferential surface 25a of the suction roll 25. The gas-permeable member 81 and the suction roll 25 allow water vapor to be uniformly extracted from an object to be processed while the object to be processed is pressed by means of the gas-permeable member 81. The roll apparatus 300 of the present invention is capable of producing a member having a concave-convex structure to be used for diffracting or scattering light at a high yield and high throughput. |
