| 摘要 |
Provided are a cleaning device and method that can prevent the propagation of bacteria with a simple means and can improve cleaning efficiency for articles to be cleaned in a cascade type cleaning device. A glass substrate (1) is transported by rollers (2) and cleaned by jet cleaning nozzles (3) and final rinsing nozzles (4). Pure water is supplied to the final rinsing nozzles (4). The cleaning waste water from the final rinsing nozzles (4) is made to flow into a tank (7), and is supplied to the nozzles (3) by a pump (9). If the bacteria count in the tank (7) increases, the water in the tank (7) is circulated and passed to an ozone water supply device (12), ozone water supplied to the tank (7), and disinfection carried out. |
