发明名称 非接触吸着装置
摘要 PROBLEM TO BE SOLVED: To form an efficient suction surface by utilizing a Coanda effect and surrounding a high-speed air flow around an entire circumference of the suction surface.SOLUTION: The non-contact suction device includes: a body which has a bottom surface facing a work surface through a certain gap and an opening formed in the center so as to be enlarged to the bottom surface; and an intermediate member arranged in the opening. A bottom surface of the intermediate member is positioned above a bottom surface of the opening, and a slit is formed between the bottom surface of the intermediate member and an inner circumference surface of the opening over the entire circumference. Through the slit, air is injected along the inner circumference surface of the opening and to an entire circumference of an outer circumference edge of the bottom surface. The high-speed air flow is formed along the bottom surface of the body from the entire circumference of the outer circumference edge toward the outer circumference by the Coanda effect. A space formed between the bottom surface of the intermediate member and the surface of the work is surrounded over its entire circumference, and the bottom surface of the intermediate member serves as the suction surface.
申请公布号 JP5995198(B2) 申请公布日期 2016.09.21
申请号 JP20110224069 申请日期 2011.10.11
申请人 国立研究開発法人産業技術総合研究所 发明人 阿部 裕幸;菊島 義弘
分类号 B25J15/06;H01L21/677 主分类号 B25J15/06
代理机构 代理人
主权项
地址