发明名称 貫通電極基板及びその製造方法、並びに貫通電極基板を用いた半導体装置
摘要 The objective of the present invention is to provide a structurally stable through-electrode substrate in which defects that accompany the presence of a boundary in an insulating portion disposed in the vicinity of the peripheral edge of a through-electrode are eliminated, and a method for manufacturing said substrate. The through-electrode substrate is characterized in having a base that has a first surface and a second surface that are mutually opposed, and a through-electrode disposed in a through-hole that passes from the first surface to the second surface of the base, the through-electrode having a first-surface-side end face and a second-surface-side end face that are exposed from the base on the first surface and the second surface, the peripheral edge of the first-surface-side end face and/or second-surface-side end face being covered by the base.
申请公布号 JP5994825(B2) 申请公布日期 2016.09.21
申请号 JP20140160122 申请日期 2014.08.06
申请人 大日本印刷株式会社 发明人 浅野 雅朗
分类号 H01L23/15;H01L21/3205;H01L21/768;H01L23/12;H01L23/14;H01L23/32;H01L23/522;H05K1/11;H05K3/06;H05K3/40 主分类号 H01L23/15
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