发明名称 APPARATUS AND METHOD FOR PREPARATION OF COMPOUNDS OR INTERMEDIATES THEREOF FROM A SOLID MATERIAL, AND USING SUCH COMPOUNDS AND INTERMEDIATES
摘要 An apparatus is described, as including a reaction region for contacting a reactant gas with a reactive solid under conditions effective to form an intermediate product, and an opening for allowing an unreacted portion of the gaseous reagent and the intermediate product to exit the reaction region. The apparatus can be beneficially employed to form a final product as a reaction product of the intermediate product and the reactant gas. The reaction of the reactant gas and reactive solid can be conducted in a first reaction zone, with the reaction of the reactant gas and intermediate product conducted in a second reaction zone. In a specific implementation, the reaction of the reactant gas and intermediate product is reversible, and the reactant gas and intermediate product are flowed to the second reaction zone at a controlled rate or in a controlled manner, to suppress back reaction forming the reactive solid.
申请公布号 EP2612349(A4) 申请公布日期 2016.09.14
申请号 EP20110822413 申请日期 2011.08.28
申请人 ENTEGRIS INC. 发明人 BYL, OLEG;JONES, EDWARD, E.;PYDI, CHIRANJEEVI;SWEENEY, JOSEPH, D.
分类号 H01L21/265;B01J8/02;B01J8/04;C01B35/06 主分类号 H01L21/265
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