| 摘要 |
A position-measuring device for detecting the position of two objects movable relative to each other, includes a measuring standard that is joined to one of the two objects, as well as a scanning system for scanning the measuring standard, the scanning system being joined to the other of the two objects. The scanning system permits a simultaneous determination of position along a first lateral shift direction and along a vertical shift direction of the objects. To that end, on the part of the scanning system, two scanning beam paths are formed, in which a group of phase-shifted signals is able to be generated in each case at the output end from interfering partial beams of rays. In addition, via the scanning system, at least a third scanning beam path is formed, by which it is possible to determine position along a second lateral shift direction of the objects. The beam from a light source is able to be supplied to the scanning system via a first light guide and coupling-in optics in common for all three scanning beam paths. The interfering partial beams of rays produced in the three scanning beam paths are able to be coupled via common coupling-out optics, into a second light guide which supplies these beams of rays to a detector system. |
