| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of reducing influences which are exerted upon image quality, by preventing electron confusion in the case where electrons are permeated through an electron beam permeable film.SOLUTION: A scanning electron microscope 1 comprises: a pressure adjustable specimen chamber 3 in which a specimen 6 is disposed at a predetermined position; an exchangeable electron gun component 2 including a vacuum sealed container 20 which is freely attachable to and detachable from the specimen chamber 3, an electron gun 21 which is disposed in one end within the vacuum sealed container 20 and emits electrons with which the specimen 6 is irradiated, and an electron beam permeable film 25 provided on a partition wall 24 opposing the electron gun 21, and including an electron beam path 23 in which at least one aperture 27 is provided between the electron gun 21 and the electron permeable film 25; and an electro-optical component group 4 for irradiating the specimen 6 with the electrons emitted from the electron gun 21. The electron beam permeable film 25 is disposed at a focal position of the electro-optical component group 4. |
