APPARATUS AND METHOD FOR MANAGING SUBSTRATE TREATING DEVICE

摘要

The present invention relates to a device for managing substrate processing equipment and a method thereof. According to an embodiment of the present invention, a substrate processing equipment managing method is the method for managing substrate processing equipment by the device for managing substrate processing equipment. The method comprises the following steps of: obtaining information with respect to substrate processing equipment during a predetermined period of time to store the information in a database; and analyzing the substrate processing equipment and a work related to the substrate processing equipment based on information built by the database.