发明名称 有機半導体素子の製造方法
摘要 In the method for producing an organic semiconductor element having a semiconductor layer according to the present invention, an optical system for irradiating a laser beam with a wavelength of at least 4 μm and a donor substrate prepared by forming an organic semiconductor film on a surface of a supporting member having a laser beam transmittance of at least 50% are used; and the donor substrate and a substrate to be treated serving as a semiconductor element are opposite one another; the laser beam is irradiated from the supporting member side; the laser beam is scanned while modulating in accordance with the semiconductor layer to be formed; and the organic semiconductor film is transferred to the substrate to be treated so as to form the semiconductor layer.
申请公布号 JP5990121(B2) 申请公布日期 2016.09.07
申请号 JP20130056723 申请日期 2013.03.19
申请人 富士フイルム株式会社 发明人 木下 正兒;宇佐美 由久
分类号 H01L21/336;H01L29/786;H01L51/05;H01L51/30;H01L51/40 主分类号 H01L21/336
代理机构 代理人
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