| 摘要 |
Present invention relate to a physical/chemical sensor and a physical/chemical phenomenon sensing device that can detect minute change of surface stress and can be reduced in size and arrayed and to provide a method for manufacturing the same
In the sensor of the present invention, an air-gap 3 is formed on a surface of the light receiving surface 1 a of a photodiode 1. The sensor comprises a membrane section 2 which is oppositely deposited, and the air-gap is blocked air-tightly or liquid-tightly. The membrane section has optical transparency and flexibility, the membrane section and the surface of the light receiving surface form a Fabry-Perot resonator. The sensing device of the present invention comprises a reference sensor, which comprises no air-gap, in addition to the sensor. The manufacturing method of the present invention comprises forming a sacrificial layer on the light receiving surface of the photodiode, depositing a protection layer on an area excluding a surface of the sacrificial layer, forming the membrane section on a membrane section construction area excluding a through area for etching, etching the sacrificial layer, and coating the through area for etching. |
