| 摘要 |
PROBLEM TO BE SOLVED: To realize a vacuum package structure which prevents sealing defects and a manufacturing method of the vacuum package structure.SOLUTION: A vacuum package has a vacuum sealed cavity part and includes: a main substrate 1; a sealing cover 2 having the cavity part on the main substrate 1 and covering the main substrate; a through hole 3 provided in a sealing cover 2 and used for exhausting the cavity part; and a plug 4 sealing the through hole 3. The plug 4 is made of a material having a thermal expansion coefficient lower than that of the sealing cover 2. After the through hole 3 is sealed by the plug 4, the plug 4 sealing the through hole 3 is covered by a sealing material 5. |
