发明名称 中空パッケージの製造方法及び中空パッケージ
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a hollow package which maintains the airtightness of a hollow part at low costs.SOLUTION: A manufacturing method of a hollow package includes: a cap placement step where a cap is placed on a substrate including a communication hole; a cap absorption step where the cap is absorbed through the communication hole; and a mold formation step where the cap absorbed by the substrate is covered and a mold closely contacting with the substrate is provided.
申请公布号 JP5982921(B2) 申请公布日期 2016.08.31
申请号 JP20120066081 申请日期 2012.03.22
申请人 日本電気株式会社 发明人 上田 卓司;田子 雅基
分类号 H01L23/02;H01L23/16 主分类号 H01L23/02
代理机构 代理人
主权项
地址