发明名称 シート貼付装置およびシート貼付方法
摘要 PROBLEM TO BE SOLVED: To provide a sheet sticking device capable of selecting a peeling sheet on and from which an adhesive sheet is to be temporarily stuck and peeled between first and second peeling sheets as intended and then sticking the adhesive sheet on an adherend.SOLUTION: A sheet sticking device 1 includes: delivery means 2 of delivering a laminate LS1 having a first peeling sheet RL1 laminated on one surface of an adhesive sheet AS with a first temporary sticking strength variable material VL1 interposed and a belt-like second peeling sheet RL2 laminated on the other surface of the adhesive sheet AS with predetermined temporary adhesive strength; first peeling means 3 of peeling the layers of the laminate LS1 from each other; and pressing means 7 of pressing and sticking the adhesive sheet AS on an adherend WF from above one of the first and second peeling sheets RL1 and RL2, having the layers peeled by the first peeling means 3 and also having the adhesive sheet AS temporarily stuck. Further, the sticking device has processing means 4 capable of selecting the peeling sheet on which the adhesive sheet AS is temporarily stuck by the first peeling means 3 according to whether predetermined processing on the first temporary sticking strength variable material VL1 is performed.
申请公布号 JP5981822(B2) 申请公布日期 2016.08.31
申请号 JP20120214914 申请日期 2012.09.27
申请人 リンテック株式会社 发明人 杉下 芳昭
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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