MICRO-ELECTRON COLUMN HAVING NANO STRUCTURE TIP WITH EASILY ALIGNING

摘要

The present invention relates to a micro-electron column having a nanostructure tip having a structure of a tube, pillar or grain with several nanoscales. More particularly, the present invention relates to a micro-electron column which has a nanostructure tip for easily emitting electrons by forming a strong electric field at an end when a voltage is applied, and facilitates different electronic lens, that is, an electron lens aperture hole and alignment. In the micro-electron column of the present invention, the size of the nanostructure tip is larger than the diameter of a source lens.