| 摘要 |
<p>PURPOSE:To facilitate the management of a jig used in a semiconductor manufacturing factory. CONSTITUTION:The total of the quantity processable 11 until a routine cleaning by a specific photomask, the total of the quantities 12, 13, 14, 15 in process by priority of a semiconductor device lot and the total of the quantity processable until inspection by a specific photomask are displayed in order. The working rank order of the photomask can be decided from the quantity in process by priority and also the timing executing the inspection and cleaning of a jig can easily be found out by displaying this on each photmask.</p> |
