CONTAMINATION SUPPRESSION IN CHEMICAL FLUID DEPOSITION
摘要
Methods for depositing materials onto a substrate surface or into a porous solid are disclosed. These methods include suppressing contamination of the deposited materials.
申请公布号
WO03060976(A1)
申请公布日期
2003.07.24
申请号
WO2002US41242
申请日期
2002.12.20
申请人
UNIVERSITY OF MASSACHUSETTS;WATKINS, JAMES, J.;CABANAS, ALBERTINA;BLACKBURN, JASON, W.
发明人
WATKINS, JAMES, J.;CABANAS, ALBERTINA;BLACKBURN, JASON, W.