| 摘要 |
PROBLEM TO BE SOLVED: To obtain an interference microscope image without limitation of resolution caused by a carrier space frequency by only rearranging data obtained by observing intensity change in interference fringes with detectors in line while slightly moving a specimen by a predetermined distance by using a specimen holding device having a specimen slight movement mechanism in addition to a biprism in an electron beam biprism interferometer.SOLUTION: A transmission electron microscope 40 comprises an electron beam interference electron beam biprism interferometer for performing simple processing of rearranging data obtained by observing intensity change in interference fringes with detectors in line while slightly moving a specimen 3 by a predetermined distance by using a specimen holding device 13 capable of slightly moving in a direction perpendicular to an optical axis. Thereby, a phase image of high resolution can be obtained without receiving limitation of resolution caused by a carrier space frequency. |
