| 摘要 |
Provided is a pressure sensor module which enables the atmospheric pressure to be reliably introduced into a reference pressure chamber. Atmospheric pressure introduction passages (27, 29) are formed in the upper wall (11) of a pressure sensor module (1), and the atmospheric pressure introduction passages (27, 29) comprise: through-holes (27a, 29a) which penetrate through the upper wall (11) in the direction away from a bottom wall member (15) which is a first wall; and grooves (27b, 29b). Each of the through-holes (27a, 29a) has: one end which is open at the outer wall surface of the second upper wall portion (11b) of the upper wall (11); and the other end which is open at the inner wall surface of the first upper wall portion (11a) of the upper wall (11) and which is connected to a reference pressure chamber (S2). The grooves (27b, 29b) extend along the outer wall surface of the second upper wall portion (11b), are open at the outer wall surface and at the side surface of the second upper wall portion (11b), and are connected to the ends of the through-holes (27a, 29a). |
