| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of obtaining an image with high contrast and S/N at an edge of a mesa structure.SOLUTION: An inspection device comprises: beam generation means for generating any of a charged particle and an electromagnetic wave as a beam; a first optical system which guides a beam to an inspection object held in a working chamber and irradiates the inspection object with the beam; a second optical system which detects a secondary charged particle generated from the inspection object; and an image processing system which forms an image on the basis of the detected secondary charged particle. A central part of the inspection object is provided with a central flat part 390. A peripheral edge of the central flat part 390 is provided with a peripheral edge flat part 392 via a step 391. An electric field correction plate 400 is installed around the step 391. A surface voltage comparable to the surface voltage to be applied to the inspection object is applied to an electrode 401 on a surface of the electric field correction plate 400. |
