发明名称 |
改善されたオフセットおよびノイズ性能を有する傾斜モード加速度計 |
摘要 |
A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass. |
申请公布号 |
JP5965934(B2) |
申请公布日期 |
2016.08.10 |
申请号 |
JP20140041260 |
申请日期 |
2014.03.04 |
申请人 |
アナログ・デバイシズ・インコーポレーテッド |
发明人 |
ジャン シン;ハワード アール. サミュエルズ;マイケル ダブリュー. ジュディー |
分类号 |
G01P15/125;B81B3/00;G01P15/08;H01L29/84 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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