发明名称 POLISHING COMPOSITION
摘要 The present invention provides a polishing composition having excellent storage stability. The present invention relates to a polishing composition including abrasive grains and an oxidant containing a halogen atom, a value (A/B) obtained by dividing the total number (A) (unit: number) of silanol groups contained in the abrasive grains in the polishing composition by a concentration (B) (unit: % by mass) of the oxidant in the polishing composition being 8 × 10 23 or less.
申请公布号 EP3053979(A1) 申请公布日期 2016.08.10
申请号 EP20140849721 申请日期 2014.09.02
申请人 FUJIMI INCORPORATED 发明人 TAMADA, SHUICHI
分类号 C09K3/14;C09G1/02;H01L21/306 主分类号 C09K3/14
代理机构 代理人
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