摘要 |
PROBLEM TO BE SOLVED: To reduce a calculation amount when the influence of electrostatic discharge on a semiconductor device is inspected.SOLUTION: A processor 2 determines a range 9 in which a resistance, a capacity or an inductor is to be extracted, out of a circuit range of a semiconductor device 7 represented by design data 4 on the basis of a frequency of a pulse signal due to electrostatic discharge and attenuation characteristics of the pulse signal dependent on a distance from an input point of the pulse signal. The processor 2 extracts the resistance, the capacity or the inductor from the determined range 9, and creates an equivalent circuit 9a of the semiconductor device 7 within the range 9.SELECTED DRAWING: Figure 1 |