发明名称 INSPECTION METHOD, INSPECTION APPARATUS, AND PROGRAM
摘要 PROBLEM TO BE SOLVED: To reduce a calculation amount when the influence of electrostatic discharge on a semiconductor device is inspected.SOLUTION: A processor 2 determines a range 9 in which a resistance, a capacity or an inductor is to be extracted, out of a circuit range of a semiconductor device 7 represented by design data 4 on the basis of a frequency of a pulse signal due to electrostatic discharge and attenuation characteristics of the pulse signal dependent on a distance from an input point of the pulse signal. The processor 2 extracts the resistance, the capacity or the inductor from the determined range 9, and creates an equivalent circuit 9a of the semiconductor device 7 within the range 9.SELECTED DRAWING: Figure 1
申请公布号 JP2016139185(A) 申请公布日期 2016.08.04
申请号 JP20150012305 申请日期 2015.01.26
申请人 SOCIONEXT INC 发明人 SATO TOMIO
分类号 G06F17/50;H01L21/82;H01L21/822;H01L27/04 主分类号 G06F17/50
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