| 摘要 |
There is provided a technique that suppresses a variation in particle diameter of a metal catalyst in the process of supporting the metal catalyst on a carrier. A CNT substrate having carbon nanotubes (CNTs) as the carrier arrayed thereon is placed in a processing chamber. Carbon dioxide is supplied to the processing chamber. After the carbon dioxide in the processing chamber is made supercritical, a complex solution in which a platinum complex is dissolved is supplied to the processing chamber. A sample temperature denoting temperature of the CNTs is controlled to be higher than an ambient temperature in the processing chamber. The CNT substrate is heated, such that a temperature difference between the ambient temperature and the sample temperature repeats increasing and decreasing. After the state of the supercritical fluid is changed to a non-supercritical state, the CNT substrate is heated, so as to cause the metal catalyst to deposit on the surface of the CNTs. |
