| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for processing a plate-like object capable of removing grinding distortion of a plate-like object and forming a gettering layer having a gettering effect in a simple method.SOLUTION: A method for processing a plate-like object comprises the steps of: holding a plate-like object by a chuck table; pressing the plate-like object held by the chuck table by rotating a polishing pad containing an abrasive grain while rotating the chuck table holding the plate-like object and polishing the plate-like object with the polishing pad while supplying an alkaline or acid polishing liquid to the plate-like object and the polishing pad; and rotating the chuck table and the polishing pad and generating a gettering layer in the plate-like object by the polishing pad while supplying a rinse liquid to the plate-like object held by the chuck table and the polishing pad pressing the plate-like object after performing the polishing step. |
