发明名称 |
COMPOSITE CERAMIC ABRASIVE POLISHING SOLUTION |
摘要 |
A polishing solution includes a fluid component and a plurality of ceramic abrasive composites. The ceramic abrasive composites include individual abrasive particles uniformly dispersed throughout a porous ceramic matrix. At least a portion of the porous ceramic matrix includes glassy ceramic material. The ceramic abrasive composites are dispersed in the fluid component. |
申请公布号 |
EP3049215(A1) |
申请公布日期 |
2016.08.03 |
申请号 |
EP20140848408 |
申请日期 |
2014.09.22 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
LUGG, PAUL S.;LEHUU, DUY K. |
分类号 |
B24B7/20;B24D3/10;B24D3/18 |
主分类号 |
B24B7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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